OYAMA, Japan--(BUSINESS WIRE)--Gigaphoton Inc. (Head Office: Oyama, Tochigi; President & CEO: Katsumi Uranaka), a leading manufacturer of light sources used in semiconductor lithography, introduced their latest optical design and manufacturing technology (= Cutting Edge Solution), and announced the development of Spectral Width Control Technology, “hMPL”. hMPL has already received highly favorable evaluations from chip manufacturers in pilot experiments, and will go on to respond to future advanced semiconductor manufacturing applications.
Spectral width is one of the most important parameters in the
semiconductor lithography process. Gigaphoton's hMPL decreased the
optical thermal load for the LNM (Line-Narrowing Module) and reduced the
spectral width target value from the existing 300 fm (femtometers) to
200 fm. In addition, by introducing a new control algorithm, widening to
an upper limit of up to 450 fm became possible.
The following two
points illustrate the advantages of hMPL. Firstly, through narrowing the
existing spectral width, contrast improves and the process window
widens. Secondly, as the spectral width can be varied, it is possible to
adjust contrast differences between exposure devices. For semiconductor
manufacturing for the IoT, this is an effective method when old and new
exposure equipment is used in combination. With these advantages, hMPL
improves the margin for the exposure process, contributing to process
optimization and to improvements in chip productivity.
hMPL will be
installed as standard on the GT65A* scheduled for shipment at the end of
2017.
Katsumi Uranaka, President & CEO of Gigaphoton commented, “Spectral Width Control Technology, (hMPL) was developed to meet the demand for semiconductors, which is expected to increase still further with the growth of an IoT-based society. We will continue to contribute to the semiconductor industry, supporting our customers with state-of-the-art technology. ”
*A news release concerning the GT65A is available at http://www.gigaphoton.com/en/news/4938
About Gigaphoton
Since it was founded in 2000, Gigaphoton has
delivered valuable solutions to semiconductor manufacturers throughout
the world as a light source supplier. In every stage from R&D to
manufacture, sales, and maintenance services, Gigaphoton is committed to
providing world-class support delivered from the perspective of everyday
users. For more information please visit Welcome
to Gigaphoton.
