New TDK Nitrogen Purge FOUP Loadport Models Launched

TDK developed and launched the 300mm and 450mm SEMI compliant loadports with Hybrid^TM N₂ Purge

LINCOLNSHIRE, Ill.--(BUSINESS WIRE)--TDK Corporation, the world’s leading supplier of loadports, will feature Hybrid^TM N₂ Purge loadports for the next generation FABs at SEMICON West 2013 at the Moscone Convention Center in San Francisco, July 9-11. TDK 300mm and 450mm N₂ loadports will be on display at booth 913 located in the South Hall.

TDK N₂ purge loadports are an effective solution to reduce wafer cross contamination between processes and oxidation. TDK Hybrid^TM N₂ Purge uses a combination of bottom and front door purge systems to maximize process and cost benefits to the Semiconductor FAB.

The TDK N₂ front purge loadport, which is currently being qualified by leading process tool manufacturers, has the advantage of large gas flow available for fast purge, purge nozzles located inside the EFEM, and capability to maintain low humidity and low particles inside the FOUP. Front purge uses existing FOUPs and no mass flow controller is required for front N₂ purge.

N₂ bottom purge uses semi compliant N₂ purge FOUPs. The FOUP door may be closed during N₂ bottom purge. Nitrogen purge is found to be effective to improve Cu interconnect reliability. With the demands of ITRS for smaller nodes, TDK Corporation with over 10 years’ experience with N₂ purge systems is working to meet the market requirements with innovative mini environment solutions.

About TDK Corporation

TDK Corporation is a leading electronics company based in Tokyo, Japan. It was established in 1935 to commercialize ferrite, a key material in electronic and magnetic products. TDK's portfolio includes electronic components, modules and systems which are marketed under the product brands TDK and EPCOS, power supplies, magnetic application products as well as energy devices, flash memory application devices, and others. TDK focuses on demanding markets in the areas of information and communication technology and consumer, automotive and industrial electronics. The company has a network of design and manufacturing locations and sales offices in Asia, Europe, and in North and South America. In fiscal 2013, TDK posted total sales of USD 9.1 billion and employed about 80,000 people worldwide