SUDBURY, Mass.--(BUSINESS WIRE)--Arradiance today received their first of order for the GEMStar-8™ Atomic Layer Deposition (ALD) system from the Singapore-MIT Alliance for Research and Technology (SMART). Founded in 2007, SMART’s Interdisciplinary Research Group, Low Energy Electronic Systems has the mission “to initiate disruptive innovation that could establish new semiconductor industries” by working across technological boundaries within an entrepreneurial infrastructure suited to such a task.
With its capability to process 8” diameter wafers using up to eight precursors, GEMStar has the flexibility to handle complex recipes having been designed with the most challenging high aspect ratio applications in mind.
“From our work with sensitive, ultra-high aspect ratio microchannel structures we became acutely aware of the need for a system which could repeatably and uniformly deposit complex films efficiently”, explains Dr. Philippe de Rouffignac, Director of Process Development and Principal Scientist for Arradiance. “We also realized that in order to meet the needs of the Research community, the tool needed to be small, powerful and flexible enough to handle the wide range of applications, substrates and materials commonly found in research environments.”
Dr. Mayank Bulsara, MIT Research Scientist states, “The GEMStar has everything our Singapore lab environment will need in an ALD tool. It is small, versatile and can handle multiple 8 inch wafers required for advanced semiconductor chip design and process development work. ”
“Our unique experience in materials science, systems engineering and product development have been combined to make a truly robust research ALD system for scientists and engineers who are serious about results”, says Ken Stenton, Arradiance CEO. “Because of the importance of materials research in the emerging growth industries being addressed by SMART such as: energy, photonics, and semiconductor, we saw the need for a research tool with production performance and reliability. We’re confident the GEMStar-8 will exceed all requirements.”
About Arradiance
Arradiance is enabling us to better perceive the hidden world all around us. Their functional film technologies greatly enhance the performance of imaging and detection systems, providing improvements that were previously unattainable. Their enabling processes will open the door to a new world of flexible, robust, electro-optic devices that will change the way we see our world.
Learn more at www.arradiance.com.