LEUVEN, Belgium & GRENOBLE, France--(BUSINESS WIRE)--JSR Micro and CEA-Leti today announced that JSR will partner with CEA-Leti to develop sub-20nm next- generation lithography materials and processes.
The program will focus on pitch division to further extend 193nm optical lithography for logic applications below the 20nm node and on direct-write lithography, a maskless lithography (ML2) technology.
The specific ML2 development will be part of the IMAGINE program, a three-year project led by CEA-Leti that also includes semiconductor manufacturers TSMC and STMicroelectronics. It is developing a maskless lithography infrastructure and the use of MAPPER Lithography tools for high throughput.
One of JSR’s key focus areas is to enable sub-20nm technology development with a strong focus on next-generation lithography.
“JSR has a good understanding on what our customers need in terms of materials innovation, product performance, continuous quality and cost requirements and manufacturing,” said Bruno Roland, President of JSR Micro. “The collaboration with CEA-Leti is therefore a great opportunity to join a large and ambitious program, and participate in challenging new lithography developments with realistic market targets. In addition to extending optical lithography, this collaboration gives us an unique opportunity to contribute to the development of ML2.”
“The development of materials and processes is one of the main challenges facing lithography at the sub-20nm range,” said Serge Tedesco, CEA-Leti program manager. “Pushing standard optical lithography in combination with new techniques, as maskless lithography, seems a real alternative and we are very excited to be supported by JSR in exploring these new areas.”
About JSR
JSR Micro N.V., based in Leuven, Belgium, is a
subsidiary of JSR Corporation, a multinational company employing over
5000 people worldwide and a leading materials supplier in a variety of
technology driven markets. JSR’s global network is headquartered in
Tokyo (Japan) and has factories and offices in Europe, US, China,
Taiwan, Korea and Singapore. JSR is a research-oriented organization
that pursues close collaborations with leading innovators in a number of
industries that are key to the present and future welfare of human
society: life-sciences, energy storage, electronic materials, display
and optical materials. ‘Innovation one-on-one’ summarizes our value
proposition to our customers. Through a very early and close
collaboration JSR offers its customers a competitive advantage based on
leading-edge technologies, consistent high quality and balanced cost of
ownership.
About CEA-Leti
Leti is an institute of CEA, a French
research-and-technology organization with activities in energy, IT,
healthcare, defence and security. Leti is focused on creating value and
innovation through technology transfer to its industrial partners. It
specializes in nanotechnologies and their applications, from wireless
devices and systems, to biology, healthcare and photonics. NEMS and MEMS
are at the core of its activities. An anchor of the MINATEC campus,
CEA-Leti operates 8,000-m² of state-of-the-art clean room space on 200mm
and 300mm wafer platforms. It employs 1,400 scientists and engineers and
hosts more than 190 Ph.D. students and 200 assignees from partner
companies. CEA-Leti owns more than 1,700 patent families.
For more
information, visit www.leti.fr.